Visible Light
现公司生产的常规可见光靶标共计四大类,包括:玻罗板、鉴别率板、十字板、星点板。均已广泛应用于市场,我司光学微加工事业部拥有国内领先的光刻加工设备,可以按客户不同要求进行加工生产。
分辨力板号 | ||||||
A1 | A2 | A3 | A4 | A5 | ||
分辨力板单元号 | 单元中每一组的明暗线条总数 | 线条宽度μm | ||||
1 | 7 | 160 | 80.0 | 40.0 | 20.0 | 10.0 |
2 | 7 | 151 | 75.5 | 37.8 | 18.9 | 9.44 |
3 | 7 | 143 | 71.3 | 35.6 | 17.8 | 8.91 |
4 | 7 | 135 | 67.3 | 33.6 | 16.8 | 8.41 |
5 | 9 | 127 | 63.5 | 31.7 | 15.9 | 7.94 |
6 | 9 | 120 | 59.9 | 30.0 | 15.0 | 7.49 |
7 | 9 | 113 | 56.6 | 28.3 | 14.1 | 7.07 |
8 | 11 | 107 | 53.4 | 26.7 | 13.3 | 6.67 |
9 | 11 | 101 | 50.4 | 25.2 | 12.6 | 6.30 |
10 | 11 | 95.1 | 47.6 | 23.8 | 11.9 | 5.95 |
11 | 13 | 89.8 | 44.9 | 22.4 | 11.2 | 5.61 |
12 | 13 | 84.8 | 42.4 | 21.2 | 10.6 | 5.30 |
13 | 15 | 80 | 40.0 | 20.0 | 10.0 | 5.00 |
14 | 15 | 75.5 | 37.8 | 18.9 | 9.44 | 4.72 |
15 | 15 | 71.3 | 35.6 | 17.8 | 8.91 | 4.45 |
16 | 17 | 67.3 | 33.6 | 16.8 | 8.41 | 4.20 |
17 | 11 | 63.5 | 31.7 | 15.9 | 7.94 | 3.97 |
18 | 13 | 59.9 | 30.0 | 15.0 | 7.49 | 3.75 |
19 | 13 | 56.6 | 28.3 | 14.1 | 7.07 | 3.54 |
20 | 13 | 53.4 | 26.7 | 13.3 | 6.67 | 3.34 |
21 | 15 | 50.4 | 25.2 | 12.6 | 6.30 | 3.15 |
22 | 15 | 47.6 | 23.8 | 11.9 | 5.95 | 2.97 |
23 | 17 | 44.9 | 22.4 | 11.2 | 5.61 | 2.81 |
24 | 17 | 42.4 | 21.2 | 10.6 | 5.30 | 2.65 |
25 | 19 | 40.0 | 20.0 | 10.0 | 5.00 | 2.50 |
线条长度 | 1-16单元 | 1.2 | 0.6 | 0.3 | 0.15 | 0.075 |
17-25单元 | 0.8 | 0.4 | 0.2 | 0.1 | 0.05 |